Advanced high-pressure plasma diagnostics with hairpin resonator probe surrounded by film and sheath

被引：0

作者：

徐金洲 ^{[1
]}

石建军 ^{[1
]}

张菁 ^{[1
]}

张琪 ^{[2
]}

中村圭二 ^{[2
]}

菅井秀郎 ^{[2
]}

机构：

[1] Department of Applied Physics,College of Science,Donghua University

[2] Department of Electrical Engineering,School of Engineering,Chubu University 1200 Matsumoto-cho,Kasugai,Aichi 487-8501,Japan

来源：

Chinese Physics B | 2010年 / 19卷 / 07期

基金：

中国国家自然科学基金;

关键词：

hairpin resonator probe; simulation; high-pressure plasma; transmission line model;

D O I：

暂无

中图分类号：

O536 [辐射与测量];

学科分类号：

070204 ;

摘要：

The hairpin probe using microwave resonance in plasma is applicable to high pressure 1.33×10 3-1.01×10 5 Pa)) as developed recently.In this work,an analytic model of the hairpin resonator probe surrounded by a thin dielectric layer and a sheath layer is proposed.The correction factor due to these surroundings is analytically found and confirmed by electromagnetic field finite difference time domain simulation,thus enabling the accurate measurement of electron density in a high-pressure non-equilibrium uniform discharge.

引用

页码：391 / 397

页数：7

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