Dynamic characteristics of ultra-precision aerostatic bearings

被引：2
|
作者：
Xue-Dong Chen [1 ]
Jin-Cheng Zhu [1 ]
Han ChenState [1 ]
机构：
[1] Key Laboratory of Digital Manufacturing Equipment and Technology,Huazhong University of Science and Technology
来源：
Advances in Manufacturing | 2013年 / 1卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Aerostatic bearing; Dynamic characteristics; Dynamic mesh;
D O I：
暂无
中图分类号：
TH133.35 [空气轴承];
学科分类号：
080203 ;
摘要：
With high acceleration and ultra-precision requirements,the design of aerostatic bearings has been gradually focused on their dynamic performances.In this paper,the dynamic stiffness and damping coefficients o aerostatic bearings are investigated.Due to compressibility of the gas,the dynamic characteristics of aerostatic bear ings show nonlinear frequency dependence.Particularly their nonlinear dynamic behaviors are quite remarkable fo ultra-precision aerostatic bearings with small air gap heights and high supply pressure.
引用
收藏
页码：82 / 86
页数：5
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