High resolution X-ray diffraction investigation of epitaxially grown SrTiO3 thin films by laser-MBE

被引：0

作者：

翟章印 ^{[1
,2
]}

吴小山 ^{[1
]}

贾全杰 ^{[3
]}

机构：

[1] Lab of Solid State Microstructures and Department of Physics, Nanjing University

[2] Jiangsu Key Laboratory for Chemistry of Low-Dimensional Materials and Department of Physics, Huaiyin Normal University

[3] BSRF, Institute of High Energy Physics, CAS

来源：

Chinese Physics C | 2009年 / 33卷 / 11期

基金：

中国国家自然科学基金;

关键词：

laser-MBE; grazing incident X-ray diffraction; reciprocal space mapping;

D O I：

暂无

中图分类号：

O484.1 [薄膜的生长、结构和外延];

学科分类号：

080501 ; 1406 ;

摘要：

SrTiO3 thin films are epitaxially grown on DyScO3, LaAlO3 substrates with/without buffer layers of DyScO3 and SrRuO3 using laser-MBE.X-ray diffraction methods, such as high resolution X-ray diffraction, grazing incident X-ray diffraction, and reciprocal space mapping are used to investigate the lattice structure, dislocation density, in-plane lattice strain distribution along film thickness.From the measurement results, the effects of substrate on film lattice quality and microstructure are discussed.

引用

页码：949 / 953

页数：5

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