Development of MEMS-based micro capacitive tactile probe

被引：0

作者：

雷李华 ^{[1
,2
]}

李源 ^{[2
]}

范国芳 ^{[3
]}

吴俊杰 ^{[2
]}

简黎 ^{[2
]}

蔡潇雨 ^{[2
]}

李同保 ^{[1
]}

机构：

[1] School of Physics Science and Engineering, Tongji University

[2] Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology

[3] Key Laboratory of Photochemical Conversion and Optoelectronic Materials,Technical Institute of Physics and Chemistry, Chinese Academy of Sciences

来源：

Chinese Physics B | 2014年 / 11期

基金：

中国国家自然科学基金;

关键词：

micro tactile probe; micro capacitive sensor; MEMS; nano measuring machine;

D O I：

暂无

中图分类号：

TM53 [电容器];

学科分类号：

摘要：

In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS(micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine(NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.

引用

页码：650 / 654

页数：5

共 50 条

[1] Development of MEMS-based micro capacitive tactile probe
Lei Li-Hua
Li Yuan
Fan Guo-Fang
Wu Jun-Jie
Jian Li
Cai Xiao-Yu
Li Tong-Bao
CHINESE PHYSICS B, 2014, 23 (11)
[2] MEMS-based tactile displays
Ishizuka, Hiroki
Miki, Norihisa
DISPLAYS, 2015, 37 : 25 - 32
[3] Development of a Biomimetic MEMS based Capacitive Tactile Sensor
Muhammad, H. B.
Oddo, C. M.
Beccai, L.
Adams, M. J.
Carrozza, M.
Hukins, D. W.
Ward, M. C.
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 124 - +
[4] Development of a MEMS-based micro combustor for a micro gas turbine engine
Shan, XC
Jin, YF
Wang, ZF
Wong, CK
Murakoshi, Y
Maeda, R
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, 2005, 5650 : 337 - 344
[5] Tactile MEMS-based Sensor for Delicate Microsurgery
Park, Young Soo
Lee, Wooho
Gopalsami, Nachappa
Gundeti, Mohan
NEXT-GENERATION ROBOTS AND SYSTEMS, 2014, 9116
[6] MEMS-based probe recording technology
Data Storage Institute, A STAR, 5 Engineering Drive 1, Singapore 117608, Singapore
J. Nanosci. Nanotechnol., 2007, 1 (181-192):
[7] Fabrication of a MEMS-based cobra probe
Huang, Jung-Tang
Hsu, Hou-Jun
Chao, Pen-Shan
Lee, Kuo-Yu
Wu, Chan-Shoue
Shih, Sheng-Hsiung
Lin, Ming-Zhe
Lee, Feng-Yue
Lan, Zheng-Chang
EDSSC: 2007 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS, VOLS 1 AND 2, PROCEEDINGS, 2007, : 809 - +
[8] MEMS-based probe recording technology
Yang, Jiaping
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2007, 7 (01) : 181 - 192
[9] Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger
Muhammad, H. B.
Oddo, C. M.
Beccai, L.
Recchiuto, C.
Anthony, C. J.
Adams, M. J.
Carrozza, M. C.
Hukins, D. W. L.
Ward, M. C. L.
SENSORS AND ACTUATORS A-PHYSICAL, 2011, 165 (02) : 221 - 229
[10] Development of Scaling Model for A MEMS-Based Micro Heat Engine
Bardaweel, H.
Preetham, B. S.
Richards, R.
Richards, C.
PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION (IMECE 2010), VOL 10, 2012, : 137 - 142

← 1 2 3 4 5 →