High-performance evanescently-coupled uni-traveling-carrier photodiodes

被引：0
|
作者：
张云霄 [1 ]
廖栽宜 [1 ]
王圩 [1 ]
机构：
[1] Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences
来源：
Chinese Physics B | 2009年 / 18卷 / 06期
基金：
中国国家自然科学基金;
关键词：
evanescently-coupled uni-traveling-carrier photodiode; multimode diluted waveguide; beam propagation method; 1-dB compression current;
D O I：
暂无
中图分类号：
TN364.2 [];
学科分类号：
摘要：
A new evanescently-coupled uni-traveling-carrier photodiode (EC-UTC PD) based on a multimode diluted waveguide (MDW) structure is fabricated, analysed and characterized. Optical and electrical characteristics of the device are investigated. The excellent characteristics are demonstrated such as a responsivity of 0.36 A/W, a bandwidth of 11.5 GHz and a small-signal 1-dB compression current greater than 18 mA at 10 GHz. The saturation current is significantly improved compared with those of similar evanescently-coupled pin photodiodes. The radio frequency (RF) bandwidth can be further improved by eliminating RF losses induced by the cables, the probe and the bias tee between the photodiode and the spectrum analyzer.
引用
收藏
页码：2393 / 2397
页数：5
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