Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas

被引：0

作者：

王松柏 ^{[1
,2
]}

雷光玖 ^{[3
]}

刘东平 ^{[4
]}

杨思泽 ^{[4
]}

机构：

[1] School of Physics and Mechanical&Electrical Engineering,Xiamen University

[2] College of Physics and Information Engineering,Fuzhou University

[3] Southwestern Institute of Physics

[4] School of Physics and Mechanical & Electrical Engineering,Xiamen University

来源：

Chinese Physics B | 2014年 / 23卷 / 07期

关键词：

high-power radio frequency plasma; Hand Hβ spectral lines in hydrogen ICPs; Stark effect;

D O I：

暂无

中图分类号：

O53 [等离子体物理学];

学科分类号：

070204 ;

摘要：

We compare Balmer-alpha(Hα) and Balmer-beta(Hβ) emissions from high-power(1.0–6.0 kW) hydrogen inductively coupled plasmas(ICPs), and propose region I(0.0–2.0 kW), region II(2.0–5.0 kW), and region III(5.0–6.0 kW). In region I, both Hαemission intensity(Iα) and Hβemission intensity(Iβ) increase with radio frequency(RF) power, which is explained by the corona model and Boltzmann’s law, etc. However, in region II, Iαalmost remains constant while Iβrapidly achieves its maximum value. In region III, Iαslightly increases with RF power, while Iβdecreases with RF power,which deviates significantly from the theoretical explanation for the Hαand Hβemissions in region I. It is suggested that two strong electric fields are generated in high-power(2.0–6.0 kW) hydrogen ICPs: one is due to the external electric field of high-power RF discharge, and the other one is due to the micro electric field of the ions and electrons around the exited state hydrogen atoms in ICPs. Therefore, the strong Stark effect can play an important role in explaining the experimental results.

引用

页码：507 / 512

页数：6

共 49 条

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