Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition

被引：0

作者：

高飞 ^{[1
]}

李雪春 ^{[1
]}

赵书霞 ^{[2
]}

王友年 ^{[1
]}

机构：

[1] School of Physics and Optoelectronic Technology, Dalian University of Technology

[2] Research Group PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1,B-2610 Antwerp, Belgium

来源：

Chinese Physics B | 2012年 / 21卷 / 07期

基金：

高等学校博士学科点专项科研基金; 中国国家自然科学基金;

关键词：

mode transition; inductively coupled plasma; Langmuir probe; ICCD;

D O I：

暂无

中图分类号：

O539 [等离子体物理的应用];

学科分类号：

070204 ;

摘要：

A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure.

引用

页码：389 / 394

页数：6

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