Corrosion of stainless steels and corrosion protection strategies in the semiconductor manufacturing industry: a review (vol 42, pg 127, 2024)

被引:0
|
作者
Ma, Chaoran [1 ]
Du, Zhuoyang [1 ]
Wang, Xiaohan [1 ]
Zhou, Peng [1 ,2 ]
Zhao, Yang [1 ]
Hua, Yong [3 ]
Su, Cheng [3 ]
Zhang, Tao [1 ]
Wang, Fuhui [1 ]
机构
[1] Northeastern Univ, Shenyang Natl Lab Mat Sci, 3-11 Wenhua Rd, Shenyang 110819, Peoples R China
[2] Northeastern Univ, State Key Lab Rolling & Automat, Shenyang 110819, Peoples R China
[3] Zhejiang JIULI Hitech Met Co Ltd, Corros & Integr Ctr, Huzhou, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1515/corrrev-2025-0004
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
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页数:1
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