Visualization of the photoconductive effect in silicon wafers using terahertz imaging

被引：0
|
作者：
Konokawa, Shiho [1 ]
Ishioka, Kazuaki [1 ]
Taira, Akinori [1 ]
机构：
[1] Mitsubishi Electr Corp, Informat Technol R&D Ctr, Kamakura, Kanagawa 2478501, Japan
来源：
IEICE COMMUNICATIONS EXPRESS | 2025年 / 14卷 / 01期
关键词：
terahertz wave; imaging;
D O I：
10.23919/comex.2024XBL0141
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we report the results of reflection imaging of silicon wafers using terahertz waves, aiming to achieve both high resolution and transparency in sensing technology. We compare the theoretical calculations of the transmittance of silicon wafers with the experimental results obtained through imaging. Through this study, we were able to confirm the frequency characteristics of silicon wafers using terahertz reflection imaging.
引用
收藏
页码：5 / 7
页数：3
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