Prototype of Flexible Digital X-Ray Imaging Detector

被引:0
|
作者
Kwon, Seyeoul [1 ]
Andrew Parker, Charles [1 ]
Paetow, Kristofer [1 ]
Reed, Hunter [1 ]
Chahid, Sara [1 ]
Jo Han, Geun [1 ]
Widjaja, Agus [1 ]
Cho, Jinhui [1 ]
Cadena, Kevin [1 ]
Granaas, Kevin [1 ]
Crocco, Jerome [1 ]
机构
[1] InnovaFlex Foundry, Colorado Springs, CO 80916 USA
关键词
Substrates; Detectors; X-ray imaging; Glass; Photodiodes; Films; Thin film transistors; Scintillators; X-ray detectors; Reliability; Flexible substrate; thin-film transistor; digital X-ray detector;
D O I
10.1109/LED.2024.3478777
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This letter presents the development of a flexible digital X-ray imaging detector based on flat panel display manufacturing principles. The detector array was fabricated using amorphous silicon thin-film transistors (a-Si TFTs) on flexible polyimide (PI) substrate. The TFT characteristics of the flexible detector array show comparable performance to the glass substrate detector array. The field effect mobility (mu) of a-Si TFT on flexible substrate was 0.66 cm(2)/V & sdot; s, the thresholder voltage (V-T) was 4.21 V, the subthreshold slops (SS) was 0.42 V/decade, and the off-current (I-OFF) was about 6.5x10(-14) A. The X-ray image was 161 mm x 215 mm in size. The environmental reliability of the flexible detector were tested using thermal and conditions of 65 degrees C at a relative humidity (RH) of 70%. Furthermore, temperature cycling between -20 degrees C/+60 degrees C was used to test the flexible detectors and which also shown acceptable passing results for commercialization. The preliminary studying results demonstrate the feasibility of a flexible X-ray imaging detector, which could have significant implications for the medical imaging industry.
引用
收藏
页码:2439 / 2442
页数:4
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