Gain Performance of Radio Frequency-Excited Axial Fast-Flow CO2 Laser Amplifier

被引:0
|
作者
Huang, Wei [1 ]
You, Cong [1 ]
Lin, Gaojie [1 ]
Li, Bo [1 ]
Zhao, Jiang [2 ]
Hu, Youyou [3 ]
机构
[1] Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Hubei, Peoples R China
[2] Hubei Univ, Sch Microelect, Wuhan 430062, Hubei, Peoples R China
[3] Jiangsu Univ Sci & Technol, Coll Sci, Zhenjiang 212100, Jiangsu, Peoples R China
关键词
amplifier; high power CO2 laser; six- temperature model; small signal gain; PULSE AMPLIFICATION;
D O I
10.3788/LOP232784
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To achieve high power, short- pulse CO2 laser outputs, a 13. 56 MHz radio frequency (RF)-excited axial fast- flow CO2 laser amplifier with an adjustable RF injection power of 0-88 kW is developed in this study. Additionally, a laser- amplification experimental device is created to investigate the gain performance of the amplifier. First, the six- temperature model theory is described and the laser- amplification kinetic equation is established and its output characteristics are calculated. Second, the relationship between amplifier RF injection power, CO2 proportion, non- dissociation ratio, and other parameters and the small- signal gain coefficient under three different cavity pressures is analyzed. When the amplifier cavity pressure is 8 kPa, the RF injection power is 50 kW, and the CO2 ratio is 14%, the maximum small- signal gain coefficient is obtained. As the RF injection power continues to increase, the small- signal gain coefficient first increases and then gradually saturates. Reasons contributing to the amplifier- gain saturation are analyzed theoretically. Based on experimental measurements, when the seed light input power is 110 W, the amplifier output power can exceed 3500 W. Finally, the evolution of the laser- pulse waveform during the gain- extraction stage is simulated and the time- domain variation characteristics of the small- signal gain coefficient are analyzed.
引用
收藏
页数:7
相关论文
共 14 条
  • [1] Demineralization Inhibition by High-Speed Scanning of 9.3 μm CO2 Single Laser Pulses Over Enamel
    Badreddine, Ali H.
    Couitt, Stephen
    Donovan, Julia
    Cantor-Balan, Roni
    Kerbage, Charles
    Rechmann, Peter
    [J]. LASERS IN SURGERY AND MEDICINE, 2021, 53 (05) : 703 - 712
  • [2] NUMERICAL INVESTIGATION OF CW CO-2 LASER WITH A FAST TURBULENT-FLOW
    BAEVA, MG
    ATANASOV, PA
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (04) : 546 - 551
  • [3] CO2 laser-produced Sn plasma as the solution for high-volume manufacturing EUV lithography
    Endo, Akira
    Abe, Tamotsu
    Hoshino, Hideo
    Ueno, Yoshifumi
    Nakano, Masaki
    Asayama, Takeshi
    Komori, Hiroshi
    Soumagne, Georg
    Mizoguchi, Hakaru
    Sumitani, Akira
    Toyoda, Koichi
    [J]. ULTRAFAST X-RAY SOURCES AND DETECTORS, 2007, 6703
  • [4] Laser-produced plasma source development for EUV lithography
    Endo, Akira
    Komori, Hiroshi
    Ueno, Yoshifumi
    Nowak, Krzysztof M.
    Takayuki, Yabu
    Tatsuya, Yanagida
    Suganuma, Takashi
    Asayama, Takeshi
    Someya, Hiroshi
    Hoshino, Hideo
    Nakano, Masaki
    Moriya, Masato
    Nishisaka, Toshihiro
    Abe, Tamotsu
    Sumitani, Akira
    Nagano, Hitoshi
    Sasaki, Youichi
    Nagai, Shinji
    Watanabe, Yukio
    Soumagne, Georg
    Ishihara, Takanobu
    Wakabayashi, Osamu
    Kakizaki, Kouji
    Mizoguchi, Hakaru
    [J]. ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES, 2009, 7271
  • [5] MULTILINE SHORT PULSE AMPLIFICATION AND COMPRESSION IN HIGH-GAIN CO2-LASER AMPLIFIERS
    FELDMAN, BJ
    [J]. OPTICS COMMUNICATIONS, 1975, 14 (01) : 13 - 16
  • [6] Hu Z, 2015, Study on the gain properties of fast axial flow CO2 laser amplifierD
  • [7] Huang H Y, 2011, The simulation and optimization of the gas flow field and heat exchanging of the high power fast axial flow CO2 laser
  • [8] Evolution and Updates of Advanced Photolithography Technology
    Li Yanli
    Liu Xianhe
    Wu Qiang
    [J]. LASER & OPTOELECTRONICS PROGRESS, 2022, 59 (09)
  • [9] Research Progress and Development Trend of Extreme Ultraviolet Lithography Source
    Lin Nan
    Yang Wenhe
    Chen Yunyi
    Wei Xin
    Wang Cheng
    Zhao Jiaoling
    Peng Yujie
    Leng Yuxin
    [J]. LASER & OPTOELECTRONICS PROGRESS, 2022, 59 (09)
  • [10] Chirped-pulse amplification in a CO2 laser
    Polyanskiy, Mikhail N.
    Babzien, Marcus
    Pogorelsky, Igor V.
    [J]. OPTICA, 2015, 2 (08): : 675 - 681