共 14 条
- [3] CO2 laser-produced Sn plasma as the solution for high-volume manufacturing EUV lithography [J]. ULTRAFAST X-RAY SOURCES AND DETECTORS, 2007, 6703
- [4] Laser-produced plasma source development for EUV lithography [J]. ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES, 2009, 7271
- [6] Hu Z, 2015, Study on the gain properties of fast axial flow CO2 laser amplifierD
- [7] Huang H Y, 2011, The simulation and optimization of the gas flow field and heat exchanging of the high power fast axial flow CO2 laser