Non-Resonant and Resonant 2D Quasi-Static PZT MEMS Scanners for LiDAR Applications

被引：1
|
作者：
Khodapanahandeh, Mehrdad [1 ]
Zolfaghari, Parviz [2 ]
Urey, Hakan [2 ]
机构：
[1] Koc Univ, Opt MEMS Res Lab OML, Dept Biomed Sci & Engn, Istanbul, Turkiye
[2] Koc Univ, Opt MEMS Res Lab OML, Dept Elect & Elect Engn, Istanbul, Turkiye
来源：
2024 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, OMN | 2024年
关键词：
Micromechanical Devices; Optical Sensors; Mechanical Sensors; Mirrors; Resonant Frequency; 2D scanner; LiDAR; Non-Resonant Scanner; MEMS;
D O I：
10.1109/OMN61224.2024.10685226
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study presents the design and simulation of four high-performing two-dimensional quasi-static MEMS laser scanners, employing both non-resonant and resonant PZT actuation mechanisms with mechanical coupling. The simulations demonstrate the achievement of optical scanning angles of up to 63.76 degrees for the non-resonant mode and 231.96 degrees for the resonant mode. Additionally, the optical scanning bandwidth-efficiency product (theta(opt).D.f) is calculated as 66.68 deg.mme.Hz for the non-resonant mode and 5741.24 deg.mme.Hz for the resonant mode, establishing these devices as the highest-performing 2D MEMS scanners reported in the literature.
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页数：2
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