Influence of substrate temperature on plasma-enhanced chemical vapor deposition to improve the surface flashover performance of epoxy resin

被引:0
|
作者
Canhui, Liu [1 ,2 ]
Yan, Mi [1 ]
Lei, Deng [1 ]
Yong, Chen [1 ]
Wentao, Liu [1 ]
Yiqin, Peng [1 ]
机构
[1] State Key Laboratory of Power Transmission Equipment Technology, School of Electrical Engineering, Chongqing University, Chongqing,400044, China
[2] Dongfang Electric (Chengdu, Innovation Research Co., Ltd, Chengdu,610213, China
关键词
Flashover - Hard facing - Insulating materials - Insulation - Phosphorus compounds - Plasma enhanced chemical vapor deposition - Scale (deposits) - Silicon compounds;
D O I
10.1088/1361-6463/ad875b
中图分类号
学科分类号
摘要
Epoxy resin composites are widely used as insulating and supporting materials in high-voltage power systems due to their excellent mechanical and electrical properties. However, long-term operation under high-voltage direct current induces surface flashover. Plasma enhanced chemical vapor deposition (PECVD) has been shown to effectively improve the surface insulation properties of epoxy resin. However, the influence of substrate temperature on the film composition, stress, morphology, and surface flashover performance remains unclear. This study uses PECVD to treat epoxy resin, enhancing its surface flashover performance. Tetraethoxysilane is used as the precursor to deposit nano-scale SiOx films on the epoxy resin surface. The effects of different substrate temperatures on the surface flashover voltage, physicochemical properties, and mechanical properties of epoxy resin are characterized. The results show that the surface flashover voltage increases and then saturates with increasing substrate temperature, improving by 27.4% at 60 °C compared to untreated samples. The surface roughness of epoxy resin decreases after plasma deposition, while highly oxidized silicon-containing functional groups are introduced. When the substrate temperature increases from 20 °C to 60 °C, the interfacial bonding strength improves by 25.9%. This study provides a simple, efficient, and controllable method to enhance the surface flashover performance of epoxy resin, promoting the application of this technology in engineering practice. © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
引用
下载
收藏
相关论文
共 50 条
  • [1] Fuzzy controller of substrate temperature in plasma-enhanced chemical vapor deposition reactor
    Chen, Changqi
    You, Jinshan
    Wang, Gensheng
    Zhu, Wu
    Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2014, 34 (04): : 403 - 407
  • [2] Plasma-enhanced chemical vapor deposition of copper
    Awaya, Nobuyoshi
    Arita, Yoshinobu
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1991, 30 (08): : 1813 - 1817
  • [3] PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION
    MOLLER, W
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 56 (06): : 469 - 469
  • [4] PLASMA-SURFACE INTERACTIONS IN PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION
    HESS, DW
    ANNUAL REVIEW OF MATERIALS SCIENCE, 1986, 16 : 163 - 183
  • [5] Surface barrier detection in plasma-enhanced chemical vapor deposition oxides
    Peavey, J
    Dawson, R
    Lowell, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 1156 - 1160
  • [6] Plasma-enhanced chemical vapor deposition surface patterning for biological materials
    Beckel, ER
    Slocik, JM
    Jiang, H
    Enlow, JO
    Naik, RR
    Bunning, TJ
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2005, 230 : U4279 - U4279
  • [7] A versatile substrate heater for thermal and plasma-enhanced chemical-vapor deposition
    Bottin, JR
    McCurdy, PR
    Fisher, ER
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (05): : 2149 - 2155
  • [8] Selective growth of boron nitride nanotubes by plasma-enhanced chemical vapor deposition at low substrate temperature
    Guo, L.
    Singh, R. N.
    NANOTECHNOLOGY, 2008, 19 (06)
  • [9] Influence of temperature on the hydrogenated amorphous carbon films prepared by plasma-enhanced chemical vapor deposition
    Wu, Jiung
    Cheng, Yi-Lung
    Shiau, Ming-Kai
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2010, 28 (06): : 1363 - 1365
  • [10] Monitoring and analyses of substrate surface in first stages of graphene growth in plasma-enhanced chemical vapor deposition
    Kawano, Masahiro
    Yamada, Shunya
    Hayashi, Yasuaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (06)