Active Control Method for Frequency Domain Error of Aerostatic Spindle Based on Acoustic Levitation

In the machining of high-end optical components, the aerostatic spindle error of an ultra-precision machine tool has a significant impact on the surface quality of the machined surfaces. The surfaces of many high-end optical components need to meet the extremely stringent requirements of the full-frequency band error, which poses significant challenge to the control of the aerostatic spindle error. In this research, we put forward an active control method for the frequency domain error of the aerostatic spindle based on acoustic levitation, in which the acoustic-magnetism-fluid-solid multi-field coupling rotor dynamics modeling method of the aerostatic spindle was proposed and the corresponding multi-field coupling model was established. Through the numerical simulation and preliminary experiments, the influence law of acoustic levitation on the frequency domain error of the aerostatic spindle is obtained. The results showed that acoustic levitation can be used to control the frequency domain error of the aerostatic spindle to some extent, which verified the effectiveness of the proposed method.