Predictive Analysis of Microcircuits’ Radiation Hardness in the Fabrication Process. II. Selection of Test Objects and the Statistical Processing of the Obtained Results

被引：0
|
作者：
Yu. M. Moskovskaya [1 ]
D. V. Boychenko [2 ]
机构：
[1] National Research Nuclear University,
[2] Moscow Engineering Physics Institute (MEPhI),undefined
[3] AO “ENPO SPECIALIZED ELECTRONIC SYSTEMS”,undefined
[4] NPK Technological Center,undefined
来源：
Russian Microelectronics | 2024年 / 53卷 / 7期
关键词：
radiation hardness; core manufacturing process; statistical control; test structures; wafer lots; nonparametric statistical criteria;
D O I：
10.1134/S1063739724700847
中图分类号：
学科分类号：
摘要：
引用
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页码：696 / 703
页数：7
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