Experimental study on microgrooves of optical fiber Fabry-Perot temperature sensor processed by femtosecond laser (invited)

被引:0
|
作者
Yin, Zekun [1 ]
Chen, Weikang [1 ]
Xie, Herui [1 ,2 ]
Cui, Jianlei [1 ]
机构
[1] State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an,710049, China
[2] Xi’an Space Engine Co. Led., Xi’an,710061, China
关键词
Age hardening - Barreling - Calendering - Chemical cleaning - Chemical finishing - Dry cleaning - Electrochemical cutting - Electrospinning - Fabry-Perot interferometers - Fiber optic sensors - Glass fibers - Gold coatings - Gold ore treatment - Gold plating - High temperature corrosion - Laminating - Laser ablation - Laser beam machining - Laser materials processing - Light interference - Metal recovery - Optical fiber fabrication - Oxygen cutting - Photorefractive crystals - Pulse repetition rate - Reclamation - Shot peening - Single mode fibers - Snow and ice removal - Soldering - Strain gages - Strain hardening - Surface cleaning - Temperature measuring instruments - Vibratory finishing;
D O I
10.3788/IRLA20240427
中图分类号
学科分类号
摘要
Objective Compared to traditional optical devices, fiber optic temperature sensors have the advantages of low loss, strong electromagnetic interference resistance, and corrosion resistance. Fiber optic Fabry-Perot (FP) sensors have attracted widespread attention due to their simple and compact structure, excellent stability, and manufacturing feasibility. However, there are some issues with the conventional methods used to fabricate the functional structures of fiber optic Fabry-Perot sensors, such as intricate fabrication procedures, low processing efficiency, and severe heat-affected zones. As optical fiber is a thin, transparent, and brittle material, laser as a non-contact processing method and micron-scale focused spot can effectively avoid mechanical damage and achieve diverse processing. Currently, challenges in laser processing include high surface roughness in the fiber core area, poor parallelism, and poor processing quality. Therefore, it is necessary to establish a set of laser process parameters that can process fiber Fabry-Perot cavities with high quality to ensure that the processed cavities meet the performance requirements of the sensors. For this purpose, this study conducted experimental research on femtosecond laser processing of FP cavities. Methods This study used a low-repetition-rate infrared femtosecond laser processing system (Fig.1) to conduct experiments on optical fibers and explore the effects of laser parameters on the morphology of the microcavity. The microcavities were observed using a laser confocal microscope and an optical microscope (Fig.2-7), and the roughness of the sidewalls of the processed microcavities was measured (Tab.2). The processed optical fiber is placed in a temperature box, and the response characteristics are obtained using a broadband light source and a spectrometer (Fig.9). Select the optimal cavity length based on the response characteristics, and package the sensor with a cavity length of 80 μm in a metal tube for testing, and obtain the response characteristics after packaging (Fig.11) Results and Discussions The experiment showed that a laser power of 10 mW can avoid the generation of excessive ablation residue and effectively remove the material. The lower scanning speed and scanning interval can avoid the convex structure in the microcavity, and the parallelism of the sidewalls can be further improved with the reciprocating scanning and the downward feeding method after each scanning. Finally, a top-down through-cavity with good entrance morphology, sidewall roughness of 2-4 μm, and parallelism between the two sidewalls as high as 87.95° was obtained. Among the five optical fibers with different cavity lengths, the sensor with a cavity length of 80 μm has the best performance of 21.07 pm/℃.The sensor sensitivity was tested by changing different temperatures in a temperature control box. The sensitivities of the three metal tube-packaged sensors with a cavity length of 80 μm were 8 pm/℃, 10.29 pm/℃, and 10.86 pm/℃, respectively. The authors hypothesize that this may be due to the different thermal expansion elongation of the different materials, which in turn leads to different sensor sensitivities. Therefore, the encapsulation material is also an important factor in the performance. Conclusions This article used low-frequency infrared femtosecond laser to conduct microgroove processing experiments for fiber-optic Fabry-Perot temperature sensors. The laser finally adopts a reciprocating scanning method. The selected laser power is 10 mW, the scanning speed is 100 μm/s, the scanning interval is 4μm, and the depth direction is scanned 5 times, with each step of 5 μm. Finally, five sensing structures with different cavity lengths and good morphology were processed, with two reflective surfaces close to parallel (up to 87.95°). The roughness of the side walls of the five cavity-length structures is mostly 2-4 μm. The performance of unpackaged optical fiber temperature sensors with different cavity lengths was tested, and it was found that the optical fiber temperature sensor with a cavity length of 80 μm has the best response performance, with a temperature sensitivity of 21.07 pm/℃. Then, optical fibers with a cavity length of 80 μm are used and packaged in stainless steel tubes, copper tubes, and aluminum tubes. The temperature sensitivities of the sensors are 8 pm/℃, 10.29 pm/℃, and 10.86 pm/℃ respectively. Compared with YANG et al[21] and CHEN et al[17], this paper uses laser control to improve the processing quality of the Fabry-Perot cavity of laser-processing fiber temperature sensors, thus further improving the temperature response characteristics of the sensor. The temperature response characteristics are improved by 13.3%. This article tests the response characteristics of the temperature sensor sensor in actual application conditions, and explores the impact of packaging materials on performance. It is found that the thermal expansion coefficient of the packaging material is the main factor affecting the sensor response characteristics. The higher the thermal expansion coefficient, the better the sensor performance. This article provides support for subsequent research on laser processing of cascaded fiber optic temperature sensors to further obtain sensors with more significant performance. © 2024 Chinese Society of Astronautics. All rights reserved.
引用
收藏
相关论文
共 50 条
  • [1] Temperature-insensitive refractive index sensor based on an optical fiber extrinsic Fabry-Perot interferometer processed by a femtosecond laser
    Liu, Pengfei
    Jiang, Lan
    Wang, Sumei
    Cao, Zhitao
    Wang, Peng
    CHINESE OPTICS LETTERS, 2016, 14 (02)
  • [2] Femtosecond laser fabricated Fabry-Perot sensors on optical fiber tip for acoustic sensor
    Wei, Heming
    Krishnaswamy, Sridhar
    HEALTH MONITORING OF STRUCTURAL AND BIOLOGICAL SYSTEMS XIII, 2019, 10972
  • [3] Optical fiber Fabry-Perot refractive-index sensor fabricated by femtosecond laser etching
    Lan, Ruo-Ming
    Jiang, Ming-Shun
    Guangdianzi Jiguang/Journal of Optoelectronics Laser, 2013, 24 (02): : 221 - 225
  • [4] An optical fiber humidity sensor based on femtosecond laser micromachining Fabry-Perot cavity with composite film
    Zhang, Zhaoxu
    Gong, Huaping
    Yu, Changgui
    Ni, Kai
    Zhao, Chunliu
    Optics and Laser Technology, 2022, 150
  • [5] An optical fiber humidity sensor based on femtosecond laser micromachining Fabry-Perot cavity with composite film
    Zhang, Zhaoxu
    Gong, Huaping
    Yu, Changgui
    Ni, Kai
    Zhao, Chunliu
    OPTICS AND LASER TECHNOLOGY, 2022, 150
  • [6] Optical Fiber Fabry-Perot Interferometer Sensor Fabricated by Femtosecond Laser-Induced Water Breakdown
    Liu, Lili
    Ren, Yanqin
    Wang, Min
    Zou, Meng
    INTEGRATED FERROELECTRICS, 2020, 208 (01) : 55 - 59
  • [7] Temperature-insensitive refractive index sensor based on an optical fiber extrinsic Fabry–Perot interferometer processed by a femtosecond laser
    刘鹏飞
    姜澜
    王素梅
    曹志涛
    王鹏
    Chinese Optics Letters, 2016, 14 (02) : 15 - 19
  • [8] Fabry-Perot optical fiber tip sensor for high temperature measurement
    Zhu, Tao
    Ke, Tao
    Rao, Yunjiang
    Chiang, Kin Seng
    OPTICS COMMUNICATIONS, 2010, 283 (19) : 3683 - 3685
  • [9] A Novel Optical Fiber Temperature Sensor Based on Fabry-Perot Cavity
    Zhao, Yong
    Wang, Dan
    Lv, Riqing
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2013, 55 (10) : 2487 - 2490
  • [10] Micromachining of an in-fiber extrinsic Fabry-Perot interferometric sensor by using a femtosecond laser
    Wang, Wei
    Rao, Yun-Jiang
    Tang, Qing-Tao
    Deng, Ming
    Zhu, Tao
    Cheng, Guang-Hua
    Zhongguo Jiguang/Chinese Journal of Lasers, 2007, 34 (12): : 1660 - 1664