Study on multi-wavelength thin film thickness determination method

被引:0
|
作者
Shi, Ce [1 ,2 ,3 ,4 ]
Xie, Mao-Bin [2 ,3 ,4 ]
Zheng, Wei-Bo [5 ]
Ji, Ruo-Nan [2 ,3 ,4 ]
Wang, Shao-Wei [2 ,3 ,4 ]
Lu, Wei [1 ,2 ,3 ]
机构
[1] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, Shanghai 200083, Peoples R China
[3] Shanghai Engn Res Ctr Energy Saving Coatings, Shanghai 200083, Peoples R China
[4] Shanghai Key Lab Opt Coatings & Spectral Modulat, Shanghai 200083, Peoples R China
[5] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
film thickness determination; transmittance and reflectance spectra; fitting; spectral reconstruction;
D O I
10.11972/j.issn.1001-9014.2024.06.012
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This work introduces a novel method for measuring thin film thickness, employing a multi-wavelength method that significantly reduces the need for broad-spectrum data. Unlike traditional techniques that require several hundred spectral data points, the multi-wavelength method achieves precise thickness measurements with data from only 10 wavelengths. This innovation not only simplifies the process of spectral measurement analysis but also enables accurate real-time thickness measurement on industrial coating production lines. The method effectively reconstructs and fits the visible spectrum (400-800 nm) using a minimal amount of data, while maintaining measurement error within 7. 1%. This advancement lays the foundation for more practical and efficient thin film thickness determination techniques in various industrial applications.
引用
收藏
页码:813 / 819
页数:7
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