Effect of Sputtering Conditions on the Microstructure and Optical Properties of SnO2 Thin Films

被引：0
|
作者：
Cheng, Zhen [1 ]
Zhang, Bianlian [1 ]
Li, Shuli [1 ]
Gong, Jialu [1 ]
Xue, Jiayi [1 ]
Li, Yuanyuan [1 ]
机构：
[1] School of Mechanical and Materials Engineering, Xi’an University, PR, Xi’an, China
来源：
Integrated Ferroelectrics | 2024年 / 240卷 / 8-9期
关键词：
10;
D O I：
10.1080/10584587.2024.2322360
中图分类号：
学科分类号：
摘要：
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页码：1287 / 1297
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