Design of soft x-ray high diffraction efficiency and spectral flux Au/Ni bilayer coated laminar-type diffraction grating for objective soft x-ray flat-field spectrograph in a region of 250-550 eV

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作者：
Koike, M. [1 ,2 ,3 ,4 ]
Hatano, T. [2 ,5 ]
Pirozhkov, A.S. [1 ]
Murano, T. [6 ]
Oue, Y. [7 ]
Koshiya, S. [6 ]
Kakio, T. [7 ]
Kondo, K. [1 ]
Terauchi, M. [2 ]
机构：
[1] Kansai Institute for Photon Science (KPSI), National Institutes for Quantum Science and Technology (QST), Kizugawa, Kyoto,619-0215, Japan
[2] Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Aoba-ku, Miyagi, Sendai,980-8577, Japan
[3] Department of Chemical Biology, Graduate School of Engineering, Osaka Metropolitan University, Sumiyoshi-ku, Osaka, Osaka,558-8585, Japan
[4] Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, Kamigori-cho, Ako-gun, Hyogo,678-1205, Japan
[5] International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University, Aoba-ku, Sendai,980-8572, Japan
[6] SA Business Unit, JEOL Ltd., Tokyo, Akishima,196-8558, Japan
[7] Device Department, Shimadzu Corporation, Nakagyu-ku, Kyoto, Kyoto,604-8511, Japan
来源：
Review of Scientific Instruments | 2024年 / 95卷 / 12期
关键词：
Wavefronts;
D O I：
10.1063/5.0232922
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