Planar two-dimensional displacement sensor based on multi-frequency magnetic field coupling

被引：0
|
作者：
Yang J. [1 ,2 ,3 ]
Tuo W. [1 ,3 ]
Zhang J. [4 ]
Feng J. [1 ,3 ]
Lu Y. [1 ,3 ]
机构：
[1] Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing
[2] Key Laboratory of Advanced Manufacturing Technology for Automobile Parts, Ministry of Education, Chongqing
[3] Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology, Chongqing
[4] School of Electrical and Electronic Engineering, Chongqing University of Technology, Chongqing
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2024年 / 45卷 / 02期
关键词：
multi-frequency magnetic field coupling; planar two-dimensional displacement measurement; two-dimensional displacement sensor;
D O I：
10.19650/j.cnki.cjsi.J2311666
中图分类号：
学科分类号：
摘要：
To meet the requirement of high-end ultra-precision equipment, such as photolithography machines and ultra-precision CNC machine tools for precise plane positioning, a planar two-dimensional displacement sensor based on multi-frequency magnetic field coupling is proposed. The sensor consists of a fixed length and a moving ruler. The fixed length is composed of a magnetically conductive substrate and an excitation coil in X- and Y-directions, and the moving ruler is composed of a magnetically conductive substrate and an induction coil in X- and Y-directions. By passing sine and cosine excitation signals to the excitation coils in X- and Y- direction, a two-dimensional uniform magnetic field array with multi-frequency magnetic field coupling is established on the fixed scale, and an electrical signal with displacement information is induced by the moving ruler. The feasibility of the multi-frequency magnetic field direct decoupling differential structure and amplitude modulation solution methods are evaluated through theoretical derivation and electromagnetic simulation. The simulation error is analyzed, and the sensor structure is optimized. Finally, the sensor prototype is manufactured by the PCB process and related experimental research is carried out. The experimental results show that the sensor can accurately measure the two-dimensional displacement in the measuring range of 150 mm × 150 mm. The measurement accuracy of the X-direction is ± 33. 08 μm and the measurement accuracy in the Y-direction is ± 36. 95 μm. The peak-to-peak values of the original internal displacement errors in the X and Y directions of the optimized sensor prototype are reduced by 49. 1% and 50. 7% on the original basis. © 2024 Science Press. All rights reserved.
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页码：201 / 213
页数：12
相关论文
共 19 条
  • [1] LV Z, LI X, SU Z, Et al., A Novel 2D micro-displacement measurement method based on the elliptical paraboloid, Applied Sciences, 9, 12, (2019)
  • [2] HUNG S K, CHUNG Y H, CHEN C L, Et al., Optoelectronic angular displacement measurement technology for 2-dimensional mirror galvanometer, Sensors, 22, 3, (2022)
  • [3] WU L, WU Y L, Et al., Planar two-dimensional time grating based on the orthogonal dual traveling wave magnetic field displacement sensor, Chinese Journal of Scientific Instrument, 43, 12, pp. 58-65, (2022)
  • [4] YANG J S, MOU Z M, LI L J, Et al., Planar two-dimensional time grating displacement sensor with differential structure, China Mechanical Engineering, 31, 12, pp. 1444-1451, (2020)
  • [5] ZHOU G Q, ZHOU Y B., An improved two-dimensio-nal micro-displacement sensing system based on tech-niques of CMOS image sensor and equal-inclination interference, Engineering Journal of Wuhan University, 50, 2, pp. 301-306, (2017)
  • [6] LI X, GAO W, MUTO H, Et al., A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage [J], Precision Engineering, 37, 3, pp. 771-781, (2013)
  • [7] KIMURA A, GAO W, KIM W, Et al., A subnanometric three-axis surface encoder with short-period planar gratings for stage motion measurement, Precision Engineering, 36, 4, pp. 576-585, (2012)
  • [8] LEE J I, HUANG X, CHU P B., Nanoprecision MEMS capacitive sensor for linear and rotational positioning, Journal of Microelectromechanical Systems, 18, 3, pp. 660-670, (2009)
  • [9] LEI Y Y., Research on two-dimensional micro-displacement positioning platform system integrated with MEMS capacitive displacement sensor, (2013)
  • [10] PENG K, LIU X K, CHEN Z R, Et al., Sensing mechanism and error analysis of a capacitive long-range displacement nanometer sensor based on time grating[J], Sensors Journal IEEE, 17, 6, pp. 1596-1607, (2017)
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