Thermodynamic Modeling of the CVD Process in the Ni–Si–C–H System

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作者：
Shestakov, V.A. [1 ]
Kosinova, M.L. [1 ]
机构：
[1] Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk,630090, Russia
来源：
Russian Journal of Inorganic Chemistry | 2024年
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
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摘要：
Silicon carbide - Thermodynamics
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