High-Precision Measurement Method for Small Angles Based on the Defect Spot Mode of the Position-Sensitive Detector

被引:0
|
作者
Zhai, Yusheng [1 ]
Wang, Guorong [1 ]
Zhao, Yiheng [1 ]
Wu, Rongxin [1 ]
Zhang, Lin [2 ]
Su, Zhan [3 ]
Zhang, Zhifeng [1 ]
Yang, Peng [1 ]
Zhang, Ruiliang [1 ]
机构
[1] School of Electronics and Information, Zhengzhou University of Light Industry, Zhengzhou,450000, China
[2] White Pigeon Abrasive Tools Co., Ltd., Zhengzhou,450000, China
[3] Henan Academy of Sciences Institute of Applied Physics Co., Ltd., Zhengzhou,450000, China
关键词
This work is supported by National Natural Science Foundation of China (U1304507); Henan Major Science and Technology Project (221100230100); Key Research and Development Special Projects in Henan Province (241111230300; 231111222800); Key Research Projects of Higher Education Institutions in Henan Province (23B416001);
D O I
10.3390/s24227120
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] High-precision detection method for an object edge based on a position-sensitive detector
    Zhai, Yusheng
    Zhao, Yiheng
    Yan, Saisai
    Zhang, Zhifeng
    Geng, Lijie
    Zhang, Ruiliang
    Yang, Kun
    Kuang, Cuifang
    [J]. APPLIED OPTICS, 2023, 62 (07) : 1815 - 1821
  • [2] High-Precision Absolute Rotary Angular Measurement by Using a Multielectrode Circular Position-Sensitive Detector
    Nakajima, Hajime
    Sumi, Kazuhiko
    Inujima, Hiroshi
    [J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2010, 59 (11) : 3041 - 3048
  • [3] MEASUREMENT OF SMALL HIGH-PRECISION ANGLES
    CHEKANOV, VE
    [J]. MEASUREMENT TECHNIQUES USSR, 1992, 35 (09): : 1113 - 1114
  • [4] A METHOD FOR MEASUREMENT OF MULTIPLE LIGHT SPOT POSITIONS ON ONE POSITION-SENSITIVE DETECTOR (PSD)
    QIAN, DH
    WANG, WJ
    BUSCHVISHNIAC, IJ
    BUCKMAN, AB
    [J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1993, 42 (01) : 14 - 18
  • [5] A Novel Circular Position Sensitive Detector for Continuously High-Precision Angle Measurement
    Meng, Xiangxu
    Sun, Siwei
    Yan, Xuetao
    Yang, Peng
    Liu, Fengman
    Cao, Liqiang
    [J]. 2023 24TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY, ICEPT, 2023,
  • [6] 2-DIMENSIONAL POSITION-SENSITIVE PHOTODETECTOR FOR HIGH-PRECISION ALIGNMENT
    ARTEMOV, YP
    BAKUMOV, LA
    BLAGIKH, VP
    KHESED, EA
    KHLYAVICH, YL
    [J]. MEASUREMENT TECHNIQUES, 1976, 19 (08) : 1111 - 1113
  • [7] Effect of light spot intensity on precision of displacement measurement based on position sensitive detector
    Zhang, Peng
    Tan, Ai-Ying
    Chen, Wei-Min
    Zhang, Yi
    [J]. Guangzi Xuebao/Acta Photonica Sinica, 2014, 43 (04):
  • [8] High-Precision Light Spot Position Detection in Low SNR Condition Based on Quadrant Detector
    Yu, Jiawei
    Li, Qing
    Li, Hongwei
    Wang, Qiang
    Zhou, Guozhong
    He, Dong
    Xu, Shaoxiong
    Xia, Yunxia
    Huang, Yongmei
    [J]. APPLIED SCIENCES-BASEL, 2019, 9 (07):
  • [9] Investigation of high-precision algorithm for the spot position detection for four-quadrant detector
    Wang, Xuan
    Su, Xiuqin
    Liu, Guizhong
    Han, Junfeng
    Wang, Rui
    [J]. OPTIK, 2020, 203 (203):
  • [10] High-Sensitivity Seawater Refraction Index Optical Measurement Sensor Based on a Position-Sensitive Detector
    Zhou, Guanlong
    Li, Liyan
    Zhou, Yan
    Chen, Xinyu
    [J]. SENSORS, 2024, 24 (07)