Bessel Beam Femtosecond Laser Interaction with Fused Silica Before and After Chemical Etching: Comparison of Single Pulse, MHz-Burst, and GHz-Burst

被引：0

|

作者：

Guilberteau, Théo ^{[1
,2
]}

Balage, Pierre ^{[1
]}

Lafargue, Manon ^{[1
,3
]}

Lopez, John ^{[1
]}

Gemini, Laura ^{[2
]}

Manek-Hönninger, Inka ^{[1
]}

机构：

[1] Université de Bordeaux-CNRS-CEA, CELIA, UMR 5107, Talence,33405, France

[2] ALPhANOV, Rue François Mitterrand, Talence,33400, France

[3] Cité de la Photonique, 11 Avenue de Canteranne, Pessac, Amplitude,33600, France

来源：

Micromachines | 2024年 / 15卷 / 11期

关键词：

D O I：

10.3390/mi15111313

中图分类号：

学科分类号：

摘要：

36

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