Spatial distribution measurement of absolute densities of CF and CF2 radicals in a high density plasma reactor using a combination of single-path infrared diode laser absorption spectroscopy and laser-induced fluorescence technique

被引：0

作者：

Nakamura, Masayuki ^{[1
]}

Nakayama, Hirotaka ^{[1
]}

Ito, Masafumi ^{[1
]}

Hori, Masaru ^{[1
]}

Goto, Toshio ^{[1
]}

Kono, Akihiro ^{[2
]}

Ishii, Nobuo ^{[3
]}

机构：

[1] Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Japan

[2] Center for Cooperative Research in Advanced Science and Technology, Nagoya University, Japan

[3] Central Research Laboratory, Tokyo Electron Ltd., Japan

来源：

Japanese Journal of Applied Physics, Part 2: Letters | 1999年 / 38卷 / 12 A期

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摘要：

引用

共 16 条

[1] Spatial distribution measurement of absolute densities of CF and CF2 radicals in a high density plasma reactor using a combination of single-path infrared diode laser absorption spectroscopy and laser-induced fluorescence technique
Nakamura, M
Nakayama, H
Ito, M
Hori, M
Goto, T
Kono, A
Ishii, N
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1999, 38 (12A): : L1469 - L1471
[2] Measurement of spatial distribution of SiF4 and SiF2 densities in high density SiF4 plasma using single-path infrared diode laser absorption spectroscopy and laser-induced fluorescence technique
Nakamura, M
Hori, M
Goto, T
Ito, M
Ishii, N
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (07): : 4730 - 4735
[3] Spatial distribution of the absolute densities of CFx radicals in fluorocarbon plasmas determined from single-path infrared laser absorption and laser-induced fluorescence
Nakamura, M
Hori, M
Goto, T
Ito, M
Ishii, N
JOURNAL OF APPLIED PHYSICS, 2001, 90 (02) : 580 - 586
[4] DETECTION OF CF2 RADICALS IN A PLASMA-ETCHING REACTOR BY LASER-INDUCED FLUORESCENCE SPECTROSCOPY
HARGIS, PJ
KUSHNER, MJ
APPLIED PHYSICS LETTERS, 1982, 40 (09) : 779 - 781
[5] Spatial and temporal variations of CF and CF2 radical densities in high-density CF4 plasmas studied by laser-induced fluorescence
Suzuki, C
Sasaki, K
Kadota, K
JOURNAL OF APPLIED PHYSICS, 1997, 82 (11) : 5321 - 5326
[6] LASER-INDUCED FLUORESCENCE DETECTION OF CF AND CF2 RADICALS IN A CF4/O2 PLASMA
BOOTH, JP
HANCOCK, G
PERRY, ND
APPLIED PHYSICS LETTERS, 1987, 50 (06) : 318 - 319
[7] SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA
BOOTH, JP
HANCOCK, G
PERRY, ND
TOOGOOD, MJ
JOURNAL OF APPLIED PHYSICS, 1989, 66 (11) : 5251 - 5257
[8] SPACE-RESOLVED AND TIME-RESOLVED MEASUREMENTS OF CF AND CF2 RADICALS IN HIGH-DENSITY CF4 PLASMAS BY LASER-INDUCED FLUORESCENCE
SUZUKI, C
KADOTA, K
APPLIED PHYSICS LETTERS, 1995, 67 (17) : 2569 - 2571
[9] CF3, CF2 AND CF RADICAL MEASUREMENTS IN RF CHF3 ETCHING PLASMA USING INFRARED DIODE-LASER ABSORPTION-SPECTROSCOPY
MARUYAMA, K
OHKOUCHI, K
OHTSU, Y
GOTO, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7B): : 4298 - 4302
[10] Surface reactivity of CF2 radicals measured using laser-induced fluorescence and C2F6 plasma molecular beams
Mackie, NM
Venturo, VA
Fisher, ER
JOURNAL OF PHYSICAL CHEMISTRY B, 1997, 101 (46): : 9425 - 9428

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