Properties of tantalum pentoxide (Ta2O5) obtained by plasma assisted deposition using a TaF5 source

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Four, S.
Devine, R.A.B.
Luo, E.Z.
Wilson, I.H.
Cheng, H.S.
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Journal of Non-Crystalline Solids | 1999年 / 254卷
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页码：139 / 145
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