SPUTTERING OF MOLECULES AND CLUSTERS.

被引：0

作者：

De Vries, A.E. ^{[1
]}

机构：

[1] FOM, Amsterdam, Neth, FOM, Amsterdam, Neth

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B27卷 / 01期

关键词：

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摘要：

This paper concerns sputtering of molecules by keV ions and by 0. 1-1 keV electrons. The emphasis is on sputtering of molecules initially not present in the solid substrate. Mass spectra, kinetic energies and internal energies of the sputtered species will be discussed.

引用

页码：173 / 180

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