Calculation and discussion on micro-segregation of dopants during CZ-silicon crystal growth

被引：0
|
作者：
Li, Ying-Chun [1 ]
Wan, Qun [1 ]
Qin, Fu [1 ]
机构：
[1] General Research Inst for, Non-ferrous Metals, China
来源：
Xiyou jinshu | 1988年 / 7卷 / 04期
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摘要：
11
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页码：252 / 256
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