PZT thin films obtained from oxide precursors

被引：0
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作者：
Universidade Federal de Sao Carlos, Sao Carlos, Brazil [1 ]
机构：
来源：
J Mater Sci Lett | / 10卷 / 833-835期
基金：
巴西圣保罗研究基金会;
关键词：
Calcination - Crystallization - Decomposition - Dissolution - Ferroelectric materials - Lead compounds - Quartz - Silicon - Stoichiometry - Thermogravimetric analysis - Thin film circuits - Vaporization;
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学科分类号：
摘要：
A hybrid chemical method for preparation of ferroelectric thin films based on a pre-calcination of oxides or carbonates, to form the desired nominal composition, followed by dissolution in an acid medium was described. The method was successfully applied to prepare lead zirconate titanate thin films. The films obtained on fused quartz and Si substrates show good quality, homogeneity and high stoichiometry control.
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