Relationship between grown-in defects in Czochralski silicon crystals

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作者：
Umeno, Shigeru [1 ]
Okui, Masahiko [1 ]
Hourai, Masataka [1 ]
Sano, Masakazu [1 ]
Tsuya, Hideki [1 ]
机构：
[1] Sumitomo Sitix Corp, Saga, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1997年 / 36卷 / 5 B期
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