Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers

被引：0
|
作者：
Phinney, Leslie M. [1 ]
Rogers, James W. [1 ]
机构：
[1] Dept. of Mechanical and Indust. Eng., Univ. Illinois at Urbana-Champaign, Urbana, IL 61801, United States
来源：
Journal of Adhesion Science and Technology | 2003年 / 17卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：603 / 622
相关论文
共 50 条
  • [1] Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers
    Phinney, LM
    Rogers, JW
    JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 2003, 17 (04) : 603 - 622
  • [2] Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers
    Phinney, L.M. (phinney@uiuc.edu), 1600, Taylor and Francis Ltd. (17):
  • [3] Repair of stiction-failed, surface-micromachined polycrystalline silicon cantilevers using pulsed lasers
    Phinney, LM
    Rogers, JW
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VI, 2000, 4174 : 279 - 287
  • [4] SURFACE-MICROMACHINED EPITAXIAL SILICON CANTILEVERS AS MOVABLE OPTICAL WAVE-GUIDES ON SILICON-ON-INSULATOR SUBSTRATES
    ENG, TTH
    KAN, SC
    WONG, GKL
    SENSORS AND ACTUATORS A-PHYSICAL, 1995, 49 (1-2) : 109 - 113
  • [5] Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films
    Tsuchiya, T
    Tabata, O
    Sakata, J
    Taga, Y
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (01) : 106 - 113
  • [6] Surface-micromachined mirrors for laser-beam positioning
    Tien, NC
    Solgaard, O
    Kiang, MH
    Daneman, M
    Lau, KY
    Muller, RS
    SENSORS AND ACTUATORS A-PHYSICAL, 1996, 52 (1-3) : 76 - 80
  • [7] OPTOELECTRONIC PACKAGING USING SILICON SURFACE-MICROMACHINED ALIGNMENT MIRRORS
    SOLGAARD, O
    DANEMAN, M
    TIEN, NC
    FRIEDBERGER, A
    MULLER, RS
    LAU, KY
    IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (01) : 41 - 43
  • [8] A novel surface-micromachined capacitive porous silicon humidity sensor
    Rittersma, ZM
    Splinter, A
    Bödecker, A
    Benecke, W
    SENSORS AND ACTUATORS B-CHEMICAL, 2000, 68 (1-3) : 210 - 217
  • [9] Continuous-membrane surface-micromachined silicon deformable mirror
    Bifano, TG
    Mali, RK
    Dorton, JK
    Perreault, J
    Vandelli, N
    Horenstein, MN
    Castanon, DA
    OPTICAL ENGINEERING, 1997, 36 (05) : 1354 - 1360
  • [10] Design and fabrication of optical MEMS using a four-level, planarized, surface-micromachined polycrystalline silicon process
    Michalicek, MA
    Comtois, JH
    Schriner, HK
    MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS III, 1998, 3276 : 48 - 55
12345