Influences of sputtering power and substrate temperature on the properties of RF magnetron sputtered indium tin oxide thin films

被引：0
|
作者：
Terzini, E. [1 ]
Nobile, G. [1 ]
Loreti, S. [1 ]
Minarini, C. [1 ]
Polichetti, T. [1 ]
Thilakan, P. [2 ]
机构：
[1] ENEA Centro Ricerche, Localitaá Granatello, 80055 Portici (NA), Italy
[2] ENEA/ICTP TRIL Prog.-ENEA Ctro. Ric., Localitaá Granatello, 80055 Portici (NA), Italy
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 6 A期
关键词：
D O I：
10.1143/jjap.38.3448
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：3448 / 3452
相关论文
共 50 条
  • [1] Influences of sputtering power and substrate temperature on the properties of RF magnetron sputtered indium tin oxide thin films
    Terzini, E
    Nobile, G
    Loreti, S
    Minarini, C
    Polichetti, T
    Thilakan, P
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (6A): : 3448 - 3452
  • [2] Properties of RF magnetron sputtered indium tin oxide thin films on externally unheated glass substrate
    Patel, K. J.
    Desai, M. S.
    Panchal, C. J.
    [J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2011, 22 (08) : 959 - 965
  • [3] Properties of RF magnetron sputtered indium tin oxide thin films on externally unheated glass substrate
    K. J. Patel
    M. S. Desai
    C. J. Panchal
    [J]. Journal of Materials Science: Materials in Electronics, 2011, 22 : 959 - 965
  • [4] Properties of indium tin oxide films prepared by rf reactive magnetron sputtering at different substrate temperature
    Meng, LJ
    dos Santos, MP
    [J]. THIN SOLID FILMS, 1998, 322 (1-2) : 56 - 62
  • [5] Investigations on the crystallisation properties of RF magnetron sputtered indium tin oxide thin films
    Thilakan, P
    Minarini, C
    Loreti, S
    Terzini, E
    [J]. THIN SOLID FILMS, 2001, 388 (1-2) : 34 - 40
  • [6] Influence of substrate temperature on properties of indium tin oxide thin films prepared by DC magnetron sputtering
    Xu Juan
    Yuan YuJie
    Wang Fang
    Zhang Kailiang
    [J]. CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2012 (CSTIC 2012), 2012, 44 (01): : 1311 - 1316
  • [7] Properties of RF magnetron sputtered cadmium-tin-oxide and indium-tin-oxide thin films
    Wohlmuth, W
    Adesida, I
    [J]. THIN SOLID FILMS, 2005, 479 (1-2) : 223 - 231
  • [8] Mechanical properties of rf magnetron sputtered indium tin oxide films
    Wu, WF
    Chiou, BS
    [J]. THIN SOLID FILMS, 1997, 293 (1-2) : 244 - 250
  • [9] Influences of indium tin oxide layer on the properties of RF magnetron-sputtered (BaSr)TiO3 thin films on indium tin oxide-coated glass substrate
    [J]. Kim, Tae Song, 1600, (32):
  • [10] Properties of indium tin oxide films deposited by RF magnetron sputtering at various substrate temperatures
    Long Bo
    Cheng Shuying
    [J]. MICRO & NANO LETTERS, 2012, 7 (08): : 835 - 837
12345