Methane decomposition and active nitrogen in a N2-CH4 glow discharge at low pressures

被引：0
|
作者：
Pintassilgo, C.D. [1 ]
Loureiro, J. [1 ]
Cernogora, G. [2 ]
Touzeau, M. [3 ]
机构：
[1] Centro de Física dos Plasmas, Departamento de Física, Instituto Superior Técnico, 1096 Lisboa Codex, Portugal
[2] Univ. de Versailles/S. Quentin, 78035 Versailles Cedex, France
[3] Lab. de Phys. des Gaz et des Plasmas, Université de Paris Sud-XI, 91405 Orsay Cedex, France
来源：
Plasma Sources Science and Technology | 1999年 / 8卷 / 03期
关键词：
Boltzmann equation - Kinetic model;
D O I：
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摘要：
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页码：463 / 478
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