Electrically detected magnetic resonance of ion-implantation damage centers in silicon large-scale integrated circuits

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[1] [1,Umeda, T.
[2] Mochizuki, Y.
[3] Okonogi, K.
[4] Hamada, K.
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Mochizuki, Y. (y-mochizuki@az.jp.nec.com) | 1600年 / American Institute of Physics Inc.卷 / 94期
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