Development of an optical stylus displacement sensor for surface profiling measurement

被引：0
|
作者：
Fukatsu, Hiroya [1 ]
Yanagi, Kazuhisa [1 ]
机构：
[1] Tokyo Metropol. Coll. of Technology, 1-10-40 Higashi-Ohi, Shinagawa-ku, Tokyo, 140-0011, Japan
来源：
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C | 2004年 / 70卷 / 06期
关键词：
D O I：
10.1299/kikaic.70.1737
中图分类号：
学科分类号：
摘要：
8
引用
收藏
页码：1737 / 1742
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