Roots dry vacuum pump made of aluminum cast alloy and reactive gas pumping

被引：0
|
作者：
Aikawa, Junichi [1 ]
Kanke, Yukio [1 ]
Yuyama, Junpei [1 ]
机构：
[1] ULVAC JAPAN, Ltd, Kanagawa, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 2000年 / 43卷 / 05期
关键词：
D O I：
10.3131/jvsj.43.564
中图分类号：
学科分类号：
摘要：
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页码：564 / 571
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