DOSIMETRY OF SOFT X-RAY AND VACUUM ULTRAVIOLET RADIATION USING THE PHOTOETCHING EFFECT.

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作者：
Valiev, K.A.
Velikov, L.V.
Dushenkov, S.D.
Mitrofanov, A.V.
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Soviet physics. Technical physics | 1983年 / 28卷 / 03期
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页码：367 / 368
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