Low-temperature sputter deposition and characterization of carbon nitride films

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作者：
Baker, M.A. [1 ]
Hammer, P. [1 ]
Lenardi, C. [1 ]
Haupt, J. [1 ]
Gissler, W. [1 ]
机构：
[1] Commission of the European, Communities, Ispra, Italy
来源：
Surface and Coatings Technology | 1997年 / 97卷 / 1 -3 pt 1期
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页码：544 / 551
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