共 50 条
- [3] Phase-shift Fizeau interferometer in presence of vibration INTERFEROMETRY XIV: APPLICATIONS, 2008, 7064
- [4] Extended averaging phase-shift schemes for Fizeau interferometry on high-numerical-aperture spherical surfaces INTERFEROMETRY XV: TECHNIQUES AND ANALYSIS, 2010, 7790
- [6] Self-calibration of a phase-shifting adapter for Fizeau interferometers Optical Review, 2009, 16 : 495 - 499
- [7] Instantaneous phase-shift Fizeau interferometer utilizing a synchronous frequency shift mechanism INTERFEROMETRY XIV: TECHNIQUES AND ANALYSIS, 2008, 7063
- [9] Phase calibration for attenuating phase-shift masks METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XX, PTS 1 AND 2, 2006, 6152
- [10] Phase-shift error in quadrature-detection-based interferometers OPTICAL SENSING AND DETECTION, 2010, 7726