Characteristics of n-GaN after Cl2/Ar and Cl2/N 2 Inductively Coupled Plasma Etching

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[1] Han, Yan-Jun
[2] Xue, Song
[3] Guo, Wen-Ping
[4] Sun, Chang-Zheng
[5] Hao, Zhi-Biao
[6] Luo, Yi
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Han, Y.-J. | 1600年 / Japan Society of Applied Physics卷 / 42期
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