c-BN FILMS OBTAINED BY IONIZED DEPOSITION.

被引：0
|
作者：
Zhou, Peng Fei [1 ]
Mori, Toshio [1 ]
Namba, Yoshikatsu [1 ]
机构：
[1] Shanghai Inst of Mechanical, Engineering, China, Shanghai Inst of Mechanical Engineering, China
来源：
Shinku/Journal of the Vacuum Society of Japan | 1985年 / 28卷 / 07期
关键词：
D O I：
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学科分类号：
摘要：
11
引用
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页码：581 / 586
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