Deposition of InN thin films by radio frequency magnetron sputtering

被引：0
|
作者：
Guo, Qixin [1 ]
Shingai, Nobuhiro [1 ]
Nishio, Mitsuhiro [1 ]
Ogawa, Hiroshi [1 ]
机构：
[1] Saga Univ, Saga, Japan
来源：
Journal of Crystal Growth | / 189-190卷
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页码：466 / 470
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