Development of a new microfabrication/MEMS course at the University of Louisville

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作者：
Walsh, Kevin [1 ]
Hanley, Thomas [1 ]
Pitts, Karl [1 ]
Crain, Mark [1 ]
Cole, Jason [1 ]
Foreman, Chris [1 ]
Hensel, Douglas [1 ]
Hernandez, Jonathan [1 ]
机构：
[1] Univ of Louisville, Louisville, United States
来源：
Biennial University/Government/Industry Microelectronics Symposium - Proceedings | 1999年
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页码：26 / 32
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