Flatness change of vacuum chuck for ultra-precision machining due to thermal deformation (1st report) - thermal behavior of vacuum chuck

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Yokoyama, Kazuhiro

Yamada, Kazutaka

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Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 1998年 / 64卷 / 08期

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页码：1201 / 1205

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