New photolithographic technique to detect the local deformation of materials. Application to WC-Co composites

被引:0
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作者
Mari, D. [1 ]
Marti, U. [1 ]
Silva, P.C. [1 ]
机构
[1] EPFL, Lausanne, Switzerland
关键词
Cobalt - Deformation - Holography - Photolithography - Scanning electron microscopy - Tungsten carbide;
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摘要
A new photolithographic technique is developed to visualize the deformation of composite materials at high temperature. A very fine metallic grid is deposited onto the surface of the samples. The grid is deposited by the evaporation of a metal through a mask fabricated by holographic lithography. This process provides a means of obtaining grids with a separation of lines as fine as 0.1 μm. Samples of WC-Co composite material were deformed at 900°C and observed by scanning electron microscopy. The displacement of the grid lines shows the decohesion of WC grains and sliding. No deformation inside the grains was observed.
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页码:203 / 206
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