ACOUSTO-OPTIC LIGHT DEFLECTOR.

被引：0
|
作者：
Tanaka, Fumio
Tani, Kenroku
机构：
来源：
National technical report | 1980年 / 26卷 / 02期
关键词：
LASERS;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A laser beam scanning unit with an acousto-optic light deflector has recently been put into practical use in order to inspect defects, such as scratches on a pattern of semiconductor devices. The acousto-optic light deflector deflects a laser beam and modulates its intensity using ultrasonic waves. Several types of acousto-optic light deflectors with TeO//2 crystal have been developed. Described are the operation principle, characteristics, driver circuit and applications of the deflector.
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页码：356 / 362
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