Determination of quantitative parameters of the local atomic structure of surface and subsurface layers by the method of energy electron loss fine structure

Currently obtaining full structure information (bond lengths, coordination numbers, etc.) by the method of EELFS has not been realized which is mainly connected with the absence of normalization of the experimental oscillating part of the spectrum to the atomic intensity of ionization of the corresponding core level. In the present work the normalized functions of the radial distribution of atoms for different depths of the layer studied have been first obtained from EELFS spectra by the Tikhonov regularization method for Fe and Cu as an example. It has been shown that the developed method of the processing of experimental data makes it possible to use the EELFS method as a structural method.