Study on growth processes of subnanometer particles in early phase of silane RF discharge

被引：0
|
作者：
Fukuzawa, Tsuyoshi [1 ]
Kawasaki, Hiroharu [1 ]
Shiratani, Masaharu [1 ]
Watanabe, Yukio [1 ]
机构：
[1] Kyushu Univ, Fukuoka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 7 B期
关键词：
Langmuir probe - Photodetachment - Silane radio frequency plasma discharge;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：4212 / 4215
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