Power durability of highly textured Al electrode in surface acoustic wave devices

被引：0
|
作者：
Matsukura, N. [1 ]
Kamijo, A. [1 ]
Ootsuka, E. [1 ]
Takahashi, Y. [1 ]
Sakairi, N. [1 ]
Yamamoto, Y. [1 ]
机构：
[1] NEC Corp, Kanagawa, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1996年 / 35卷 / 5 B期
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页码：2983 / 2986
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