Effect of additional elements on the crystallization process in Fe-Ta-C thin films

被引：0
|
作者：
Kirino, Fumiyoshi [1 ]
Otomo, Shigekazu [1 ]
Koiso, Nagatsugu [1 ]
Yano, Fumiko [1 ]
机构：
[1] Hitachi, Ltd, Tokyo, Japan
来源：
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals | 1996年 / 60卷 / 05期
关键词：
Amorphous films - Annealing - Chromium - Crystal structure - Crystallization - Differential scanning calorimetry - Magnetic properties - Metallic films - Niobium - Sputtering - Transmission electron microscopy - X ray diffraction;
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摘要：
The crystallization mechanisms of Fe-Ta-C alloy films added Nb and Cr were studied in terms of changes in the crystal structure and magnetic properties. When Nb and Cr were added to Fe-Ta-C, no microcrystal such as TaC was observed under TEM in the as deposited film, indicating that the film is in an amorphous state. The DSC measurements of the Cr- and Nb-doped films showed that the crystallization temperature is 787 K, higher than that in Fe-Ta-C films. The complete crystallization of Cr- and Nb-doped Fe-Ta-C alloy thin films occurred at the same temperature. The magnetic properties also changed at 787 K. The Bs value of the as-deposited Fe-Ta-Cr-Nb-C film was 0.1 T. This is smaller than that of the Fe-Ta-C thin film.
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页码：519 / 528
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