MOCVD of epitaxial BaTiO3 films using a liquid barium precursor

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作者
Teren, A.R. [1 ]
Belot, J.A. [2 ]
Edleman, N.L. [2 ]
Marks, T.J. [2 ]
Wessels, B.W. [1 ]
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[1] Department of Materials Science and Engineering, Northwestern University, 2225 N. Campus Drive, Evanston, IL 60208, United States
[2] Department of Chemistry, Northwestern University, 2145 Sheridan Rd., Evanston, IL 60208, United States
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14
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页码:175 / 177
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